JPH0419915B2 - - Google Patents

Info

Publication number
JPH0419915B2
JPH0419915B2 JP25371986A JP25371986A JPH0419915B2 JP H0419915 B2 JPH0419915 B2 JP H0419915B2 JP 25371986 A JP25371986 A JP 25371986A JP 25371986 A JP25371986 A JP 25371986A JP H0419915 B2 JPH0419915 B2 JP H0419915B2
Authority
JP
Japan
Prior art keywords
air
flat plate
tank
holes
short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP25371986A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63107792A (ja
Inventor
Masayuki Arai
Hiroshi Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP25371986A priority Critical patent/JPS63107792A/ja
Publication of JPS63107792A publication Critical patent/JPS63107792A/ja
Publication of JPH0419915B2 publication Critical patent/JPH0419915B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP25371986A 1986-10-27 1986-10-27 空気等流量分配板 Granted JPS63107792A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25371986A JPS63107792A (ja) 1986-10-27 1986-10-27 空気等流量分配板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25371986A JPS63107792A (ja) 1986-10-27 1986-10-27 空気等流量分配板

Publications (2)

Publication Number Publication Date
JPS63107792A JPS63107792A (ja) 1988-05-12
JPH0419915B2 true JPH0419915B2 (en]) 1992-03-31

Family

ID=17255192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25371986A Granted JPS63107792A (ja) 1986-10-27 1986-10-27 空気等流量分配板

Country Status (1)

Country Link
JP (1) JPS63107792A (en])

Also Published As

Publication number Publication date
JPS63107792A (ja) 1988-05-12

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